Skip to main content
M&M 2024 Meeting (Microscopy & Microanalysis) Main banner
Final Program


Physical Sciences Symposia

P03.P1 - Electron Microscopy of Advanced Functional Materials

(87) STEM Energy-Dispersive X-ray Spectroscopy for Quantitative Compositional Metrology in ULSI Technology

Monday, July 29, 2024
3:00 PM - 5:00 PM US EST
Location: Exhibit Hall

    Presenting Author(s)

  • AK

    Amit Kohn, PhD (he/him/his)

    Department of Materials Science and Engineering, The Iby and Aladar Fleischman Faculty of Engineering, Tel Aviv University, Ramat Aviv, Tel Aviv 6997801, Israel
    Tel Aviv University
    Tel Aviv, Tel Aviv, Israel

    • Co-Author(s)

  • DF

    Daniel Fishman

    Department of Materials Science and Engineering, The Iby and Aladar Fleischman Faculty of Engineering, Tel Aviv University, Israel

  • Adham Basha, Ph.D. (he/him/his)

    Department of Materials Science and Engineering, The Iby and Aladar Fleischman Faculty of Engineering, Tel Aviv University, Ramat Aviv, Tel Aviv 6997801, Israel
    Daliat el Carmel, Israel

  • AA

    Amram Azulay, Ph.D.

    Department of Materials Science and Engineering, The Iby and Aladar Fleischman Faculty of Engineering, Tel Aviv University, Israel


All papers can be viewed in the published Meeting Proceedings on the MaM journal website.