X-ray fluorescence is a powerful technique capable of identifying elements within a material in a non-destructive way. However, many commercial XRF scanners lack the resolution and sensitivity for trace-element analysis, limiting the technique often to bulk studies only. In this tutorial, we will detail the implementation of Sigray's high-resolution XRF microscope: AttoMap MicroXRF. This instrument offers sub-ppm detection sensitivity, providing unique insight for contaminant analysis, dopant concentration, and can even be used for non-destructive layer thickness measurements in multi-layered structures with sub-Angstrom precision. AttoMap ushers in a new era of micro-XRF analysis and has many fascinating applications, from mining/mineralogy to environmental science and even electronic part characterization - these applications will be discussed during this tutorial in a series of case study presentations.
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