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Final Program


Featured Symposium

Analytical Sciences Symposia

A10.6 - Correlative Analysis and Multimodal Microscopy and Spectroscopy

Understanding Ion Implantation Defect Distributions in Silicon Induced by FIB and Other Ion Sources Using Advanced STEM

Wednesday, July 31, 2024
11:00 AM - 11:15 AM US EST
Location: 3

All papers can be viewed in the published Meeting Proceedings on the MaM journal website.

    Presenting Author(s)

  • Luis Jauregui

    Sandia National laboratories
    Albuquerque, New Mexico, United States

    • Co-Author(s)

  • PL

    Ping Lu

    Staff Scientist
    Sandia National laboratories, United States

  • MT

    Michael Titze

    Sandia National laboratories
    Albuquerque, New Mexico, United States

  • DC

    Deanna Campbell

    Sandia National laboratories, United States

  • DS

    David Scrymgeour

    Sandia National laboratories, United States