C04.3 - Machine Learning-driven Automated Microscopy for Materials Discovery and Semiconductor Manufacturing

Session Chair(s)

• YL

  Yongtao Liu

  R&D Staff
  Oak Ridge National Laboratory, United States
• MZ

  Maxim Ziatdinov

  PNNL, United States
• TT

  Tuyen Tran

Presentations:

• 3:30 PM - 4:00 PM US EST

  The use of Artificial Intelligence and Machine learning in soft X-ray technology for Advanced Semiconductor Process Development and Control
  

  Presenting Author: Adrian S. Wilson – Nova Measuring Instruments, Inc.

  Co-Author: Wei Ti Lee – Nova Measuring Instruments, Inc.

  Co-Author: Parker Lund – Nova Measuring Instruments, Inc.

  Co-Author: Mitch Shiver – Nova Measuring Instruments, Inc.

  Co-Author: Parikshit Jain – Nova Measuring Instruments, Inc.

  Co-Author: Torsten Stoll – Nova Measuring Instruments, Inc.

  Co-Author: Dmitry Kislitsyn – Nova Measuring Instruments, Inc.
• 4:00 PM - 4:15 PM US EST

  Automating X-ray Fluorescence Mapping with Differentiable Modeling
  

  Presenting Author: Xiangyu Yin – Argonne National Laboratory

  Co-Author: Zichao Wendy Di – Argonne National Laboratory

  Co-Author: Olga Antipova – Argonne National Laboratory

  Co-Author: Si Chen – Argonne National Laboratory

  Co-Author: Yi Jiang – Argonne National Laboratory

  Co-Author: Arthur Glowacki – Argonne National Laboratory
• 4:15 PM - 4:30 PM US EST

  Enhancing 3D SEM Imaging with AI: Generating Training Data through Laser Machining and Confocal Analysis
  

  Presenting Author: Hongbin Choi – UConn

  Co-Author: Alexander Blagojevic – UConn

  Co-Author: Matthew Maniscalco – UConn

  Co-Author: Adrian Phoulady – UConn

  Co-Author: Toni Moore – UConn

  Co-Author: Nicholas May – UConn

  Co-Author: Sina Shahbazmohamadi – UConn

  Co-Author: Pouya Tavousi – UConn
• 4:30 PM - 5:00 PM US EST

  CANCELLED: Towards Autonomous Synchrotron Fourier Transform Infrared Microscopy
  

  Presenting Author: Peter Zwart – Lawrence Berkeley National Laboratory

  Co-Author: Neslihan Tas – LBL

  Co-Author: Marcus Noack – LBL

  Co-Author: HoiYing Holman – LBL