A06.3 - Electronic and Thermal Device Characterization with Electron Microscopy

Session Chair(s)

• 

  Jinwoo Hwang, Ph.D

  Associate Professor
  The Ohio State University
  Columbus, Ohio, United States

Presentations:

• 1:30 PM - 2:00 PM US EST

  Measurement of electrostatic potentials in semiconductor devices by off-axis electron holography.
  

  Presenting Author: David Cooper – Univ. Grenoble Alpes, CEA LETI

  Co-Author: Victor Boureau – EPFL
• 2:00 PM - 2:15 PM US EST

  Chasing Down Leads: Imaging Conductivity Networks in a FinFET Processor
  

  Presenting Author: William Hubbard, PhD (he/him/his) – NanoElectronic Imaging Inc.

  Co-Author: Cecile Bonifacio – E.A. Fischione Instruments, Inc.

  Co-Author: Richard Li, PhD (he/him/his) – EA Fischione Instruments Inc.

  Co-Author: Mary Ray – E.A. Fischione Instruments, Inc.

  Co-Author: B.C. Regan – University of California, Los Angeles

  Co-Author: Paul Fischione – E.A. Fischione Instruments, Inc.
• 2:15 PM - 2:30 PM US EST

  Nano-PUND and STEM EBIC Imaging for Ferroelectric Polarization Mapping
  

  Presenting Author: Ho Leung Chan – University of California, Los Angeles

  Co-Author: Yueyun Chen – UCLA

  Co-Author: Tristan O'Neill – UCLA

  Co-Author: Shelby Fields – University of Virginia

  Co-Author: Megan Lenox – University of Virginia

  Co-Author: Jon Ihlefeld – University of Virginia

  Co-Author: William Hubbard, PhD (he/him/his) – NanoElectronic Imaging Inc.

  Co-Author: B. C. Regan – University of California, Los Angeles