A06.1 - Electronic and Thermal Device Characterization with Electron Microscopy

Session Chair(s)

• ML

  Maureen Joel Lagos

  Associate Professor
  McMaster University, United States

Presentations:

• 1:30 PM - 2:00 PM US EST

  From imaging conductivity to imaging electron density
  

  Presenting Author: Ondrej Dyck – Oak Ridge National Laboratory

  Co-Author: Jawaher Almutlaq – Massachusetts Institute of Technology

  Co-Author: David Lingerfelt – Oak Ridge National Laboratory

  Co-Author: Jacob Swett – Arizona State University

  Co-Author: Bevin Huang – Massachusetts Institute of Technology

  Co-Author: Andrew R. Lupini – Oak Ridge National Laboratory

  Co-Author: Dirk Englund – Massachusetts Institute of Technology

  Co-Author: Stephen Jesse – Oak Ridge National Laboratory
• 2:00 PM - 2:15 PM US EST

  TEM Specimen Preparation for STEM-EBIC Analysis of Advanced Semiconductor Devices
  

  Presenting Author: Cecile Bonifacio – E.A. Fischione Instruments, Inc.

  Co-Author: William Hubbard, PhD (he/him/his) – NanoElectronic Imaging Inc.

  Co-Author: Richard Li, PhD (he/him/his) – EA Fischione Instruments Inc.

  Co-Author: Mary Ray – E.A. Fischione Instruments, Inc.

  Co-Author: Paul Fischione – E.A. Fischione Instruments, Inc.
• 2:15 PM - 2:30 PM US EST

  Adapting Conventional SEM and STEM Instruments for Acquisition of Electron-Beam Induced Current (EBIC) Images
  

  Presenting Author: Fernando Camino – Brookhaven National Laboratory

  Co-Author: Myung-Geun Han – Brookhaven National Lab

  Co-Author: Alexandre Pofelski – Brookhaven National Laboratory

  Co-Author: Armando Rua – University of Puerto Rico at Mayagüez

  Co-Author: Kim Kisslinger – Brookhaven National Laboratory

  Co-Author: Daniel Hayes – Purdue University

  Co-Author: Juan Alban – Purdue University

  Co-Author: Rakesh Agrawal – Purdue University