C04.1 - Machine Learning-driven Automated Microscopy for Materials Discovery and Semiconductor Manufacturing

Session Chair(s)

• YL

  Yongtao Liu

  R&D Staff
  Oak Ridge National Laboratory, United States
• MZ

  Maxim Ziatdinov

  PNNL, United States
• TT

  Tuyen Tran

Presentations:

• 8:30 AM - 9:00 AM US EST

  High Performance Computing and Artificial Intelligence Enabled Materials Characterization and Experimental Automation
  

  Presenting Author: Mathew Cherukara – Argonne National Laboratory
• 9:00 AM - 9:15 AM US EST

  Dynamic STEM-EELS of atom and defect evolution during electron beam transformations
  

  Presenting Author: Kevin Roccapriore (he/him/his) – Oak Ridge National Laboratory

  Co-Author: Riccardo Torsi – The Pennsylvania State University

  Co-Author: Joshua Robinson – The Pennsylvania State University

  Co-Author: Sergei Kalinin (he/him/his) – Pacific Northwest National Laboratory, Richland, WA, United States

  Co-Author: Maxim Ziatdinov – Pacific Northwest National Laboratory
• 9:15 AM - 9:30 AM US EST

  Active Learning based Structure-Property Correlation in STM
  

  Presenting Author: Ganesh Narasimha – Oak Ridge National Laboratory (ORNL)

  Co-Author: Dejia Kong – University of Virginia

  Co-Author: Zheng Gai – Oak Ridge National Laboratory (ORNL)

  Co-Author: Rama Vasudevan – Oak Ridge National Laboratory

  Co-Author: Maxim Ziatdinov – Pacific Northwest National Laboratory
• 9:30 AM - 9:45 AM US EST

  Development of Automatic Cross-Sectional Scanning-Electron-Microscope-Observation Technique using Image Recognition of Semiconductor-Devices Structure
  

  Presenting Author: Takashi Dobashi (he/him/his) – Hitachi, Ltd

  Co-Author: Hiroyuki Yamamoto – Hitachi, Ltd

  Co-Author: Takeshi Ohmori, Ph. D – Hitachi, Ltd
• 9:45 AM - 10:00 AM US EST

  Automating Experiments with Scanning Probe Microscopy
  

  Presenting Author: Yu Liu – University of Tennessee

  Co-Author: UTKARSH PRATIUSH – UT Knoxville

  Co-Author: Jason Bemis – Oxford Instruments Asylum Research

  Co-Author: Roger Proksch – Oxford Instruments Asylum Research

  Co-Author: Sergei Kalinin (he/him/his) – Pacific Northwest National Laboratory, Richland, WA, United States